Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was micro fabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micro machined knife gate valves in pressure control systems enhances performance and cost savings can be realized.
Knife gate valve
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